apparatus CapableOf comprise a wafer support
Typicality: 0.282
Saliency: 0.076

Facets 1
for maintaining a wafer 5 purpose
Open triples 1
apparatus → comprise → a wafer support 5
Sentiment analysis
negative neutral positive
0.018 0.877 0.106
Other statistics
Raw frequency 5
Normalized frequency 0.076
Modifier score 0.500
Perplexity 234.883