| Typicality: | 0.312 |
| Saliency: | 0.145 |
| by the same conveyor | 8 | manner |
| apparatus → transfer → wafer | 4 |
| apparatus → transfer → dummy wafers | 4 |
| negative | neutral | positive |
| 0.022 | 0.850 | 0.128 |
| Raw frequency | 8 |
| Normalized frequency | 0.145 |
| Modifier score | 0.500 |
| Perplexity | 357.709 |