| Typicality: | 0.268 |
| Saliency: | 0.043 |
| in accordance with the present invention | 3 | other |
| apparatus → have → a plurality of processing chambers | 4 |
| negative | neutral | positive |
| 0.022 | 0.850 | 0.128 |
| Raw frequency | 4 |
| Normalized frequency | 0.043 |
| Modifier score | 0.500 |
| Perplexity | 102.925 |