| Typicality: | 0.427 |
| Saliency: | 0.414 |
| with a computer backup process | 13 | other |
| with apparatus | 12 | other |
| with lithographic patterning tools | 11 | other |
| apparatus → be used in → conjunction | 40 |
| apparatus → be described in → conjunction | 9 |
| negative | neutral | positive |
| 0.035 | 0.820 | 0.145 |
| Raw frequency | 49 |
| Normalized frequency | 0.414 |
| Modifier score | 0.500 |
| Perplexity | 42.366 |