background → RelatedTo → apparatus
Typicality: 0.250
Saliency: 0.000
Facets 1
for wafer for various objects 3 purpose
Open triples 1
background → relate to → apparatus 3
Sentiment analysis
negative neutral positive
0.020 0.862 0.118
Other statistics
Raw frequency 3
Normalized frequency 0.000
Modifier score 0.500
Perplexity 20.740