| Typicality: | 0.250 |
| Saliency: | 0.000 |
| by electromagnetic deflection coils | 3 | manner |
| beam → scan across → the surface of the sample | 3 |
| negative | neutral | positive |
| 0.066 | 0.893 | 0.041 |
| Raw frequency | 3 |
| Normalized frequency | 0.000 |
| Modifier score | 0.500 |
| Perplexity | 89.360 |