subgroup of
beam)
→
CapableOf
→
impinge on said wafer
| Typicality: | 0.395 |
| Saliency: | 0.340 |
| at said spots | 6 | location |
| laser beam → impinge on → said wafer | 3 |
| laser beam → impinge on → the wafer | 3 |
| negative | neutral | positive |
| 0.068 | 0.872 | 0.059 |
| Raw frequency | 6 |
| Normalized frequency | 0.340 |
| Modifier score | 0.500 |
| Perplexity | 98.327 |