| Typicality: | 0.452 |
| Saliency: | 0.472 |
| in the present embodiment | 2 | location |
| cathode → be formed in → the vapor deposition chamber | 6 |
| cathode → be formed by → vapor deposition | 5 |
| negative | neutral | positive |
| 0.073 | 0.886 | 0.041 |
| Raw frequency | 11 |
| Normalized frequency | 0.472 |
| Modifier score | 0.500 |
| Perplexity | 78.088 |