| Typicality: | 0.276 |
| Saliency: | 0.061 |
| after rinsing the substrate | 2 | temporal |
| selectively | 2 | manner |
| cavity → be filled with → copper | 4 |
| negative | neutral | positive |
| 0.132 | 0.802 | 0.066 |
| Raw frequency | 4 |
| Normalized frequency | 0.061 |
| Modifier score | 0.500 |
| Perplexity | 53.692 |