| Typicality: | 0.302 |
| Saliency: | 0.123 |
| with reference to fig | 3 | other |
| coating → be applied by → sputtering | 3 |
| coating → be → sputter | 3 |
| negative | neutral | positive |
| 0.036 | 0.897 | 0.067 |
| Raw frequency | 6 |
| Normalized frequency | 0.123 |
| Modifier score | 0.500 |
| Perplexity | 244.105 |