| Typicality: | 0.609 |
| Saliency: | 0.538 |
| by sputtering | 8 | manner |
| in any desired concentration | 7 | other |
| directly | 4 | manner |
| coating → be applied to → the substrate | 26 |
| coating → be applied to → substrate | 19 |
| coating → apply to → the substrate | 8 |
| coating → be applied to → substrate surface | 3 |
| coating → be applied onto → the substrate | 3 |
| coating → be applied on → substrate | 3 |
| negative | neutral | positive |
| 0.105 | 0.784 | 0.111 |
| Raw frequency | 62 |
| Normalized frequency | 0.538 |
| Modifier score | 0.900 |
| Perplexity | 53.110 |