contact → ReceivesAction → formed on interlayer insulating film
Typicality: 0.250
Saliency: 0.000
Facets 1
through the contact hole 2 manner
Open triples 1
contact → be formed on → interlayer insulating film 3
Sentiment analysis
negative neutral positive
0.038 0.887 0.075
Other statistics
Raw frequency 3
Normalized frequency 0.000
Modifier score 0.500
Perplexity 252.705