aspect of
detector)
→
ReceivesAction
→
generated by the inspection system
| Typicality: | 0.659 |
| Saliency: | 0.579 |
| for more than one wafer | 3 | other |
| output → be generated by → the inspection system | 6 |
| output → use → the inspection system | 4 |
| negative | neutral | positive |
| 0.194 | 0.747 | 0.059 |
| Raw frequency | 10 |
| Normalized frequency | 0.579 |
| Modifier score | 1.000 |
| Perplexity | 203.348 |