duration → ReceivesAction → controlled to control etch aspect ratio dependence
Typicality: 0.306
Saliency: 0.132
Facets 0
No facets.
Open triples 1
duration → be controlled to control → etch aspect ratio dependence 5
Sentiment analysis
negative neutral positive
0.045 0.908 0.047
Other statistics
Raw frequency 5
Normalized frequency 0.132
Modifier score 0.500
Perplexity 155.295