| Typicality: | 0.332 |
| Saliency: | 0.193 |
| by dry etching | 2 | manner |
| electrode → insulate → film | 5 |
| electrode → pad → surface of the insulating film | 3 |
| negative | neutral | positive |
| 0.098 | 0.849 | 0.052 |
| Raw frequency | 8 |
| Normalized frequency | 0.193 |
| Modifier score | 0.500 |
| Perplexity | 295.946 |