electrode CapableOf use ion beam assisted deposition ibadprocess
Typicality: 0.274
Saliency: 0.057

Facets 0
No facets.
Open triples 1
electrode → use → ion beam assisted deposition ibadprocess 4
Sentiment analysis
negative neutral positive
0.025 0.928 0.047
Other statistics
Raw frequency 4
Normalized frequency 0.057
Modifier score 0.500
Perplexity 71.760