| in the dielectric layer | 4 | location |
| next | 2 | temporal |
| to contact the conductive caps | 2 | purpose |
| electrode → have → opening | 5 |
| electrode → be formed within → opening | 3 |
| negative | neutral | positive |
| 0.034 | 0.880 | 0.085 |
| Raw frequency | 8 |
| Normalized frequency | 0.193 |
| Modifier score | 0.600 |
| Perplexity | 424.441 |