| Typicality: | 0.250 |
| Saliency: | 0.000 |
| on a surface of a substrate | 3 | location |
| electrode → be disposed within → dielectric layer | 3 |
| negative | neutral | positive |
| 0.096 | 0.863 | 0.041 |
| Raw frequency | 3 |
| Normalized frequency | 0.000 |
| Modifier score | 0.500 |
| Perplexity | 25.624 |