| Typicality: | 0.321 |
| Saliency: | 0.166 |
| to form the gate | 2 | purpose |
| electrode → be patterned by → photolithography | 4 |
| electrode → use → photolithographic techniques | 3 |
| negative | neutral | positive |
| 0.051 | 0.868 | 0.081 |
| Raw frequency | 7 |
| Normalized frequency | 0.166 |
| Modifier score | 0.500 |
| Perplexity | 84.948 |