| Typicality: | 0.377 |
| Saliency: | 0.297 |
| with a 200 mm diameter | 10 | other |
| more preferably | 6 | degree |
| with a cavity | 3 | other |
| embodiment → comprise → substrate | 12 |
| embodiment → include → substrate | 10 |
| embodiment → be conducted on → substrate | 5 |
| embodiment → have → substrate | 4 |
| embodiment → provide → substrate | 4 |
| negative | neutral | positive |
| 0.047 | 0.891 | 0.062 |
| Raw frequency | 35 |
| Normalized frequency | 0.297 |
| Modifier score | 0.500 |
| Perplexity | 272.559 |