| Typicality: | 0.250 |
| Saliency: | 0.000 |
| next | 3 | temporal |
| explanation → be given of → a semiconductor device manufacturing process | 3 |
| negative | neutral | positive |
| 0.017 | 0.932 | 0.051 |
| Raw frequency | 3 |
| Normalized frequency | 0.000 |
| Modifier score | 0.500 |
| Perplexity | 48.275 |