| Typicality: | 0.479 |
| Saliency: | 0.537 |
| for manufacturing a semiconductor device | 9 | purpose |
| fig → illustrate → method | 23 |
| fig → illustrate → exemplary method | 7 |
| fig → show → method | 6 |
| negative | neutral | positive |
| 0.022 | 0.850 | 0.128 |
| Raw frequency | 36 |
| Normalized frequency | 0.537 |
| Modifier score | 0.500 |
| Perplexity | 381.141 |