as its main component | 8 | other |
as a silicon nitride film | 3 | manner |
mainly | 3 | degree |
thin film → contain → carbon | 11 |
negative | neutral | positive |
0.034 | 0.912 | 0.054 |
Raw frequency | 11 |
Normalized frequency | 0.556 |
Modifier score | 0.900 |
Perplexity | 335.756 |