thin film (subgroup of film) → ReceivesAction → deposited by atomic layer deposition
Typicality: 0.451
Saliency: 0.470
Facets 0
No facets.
Open triples 2
thin film → be deposited by → atomic layer deposition 5
thin film → be formed by → atomic layer deposition 4
Sentiment analysis
negative neutral positive
0.055 0.791 0.154
Other statistics
Raw frequency 9
Normalized frequency 0.470
Modifier score 0.500
Perplexity 138.356