subgroup of
film)
→
ReceivesAction
→
formed on wafer
| Typicality: | 0.503 |
| Saliency: | 0.594 |
| by a decomposition product | 2 | cause |
| thin film → be formed on → wafer | 6 |
| thin film → be formed on → the wafer | 3 |
| thin film → be grown on → the wafer | 3 |
| negative | neutral | positive |
| 0.068 | 0.695 | 0.237 |
| Raw frequency | 12 |
| Normalized frequency | 0.594 |
| Modifier score | 0.500 |
| Perplexity | 36.751 |