into the polycrystalline thin film layer | 5 | transitive-object |
at a temperature | 3 | other |
fluorine → contain → layer | 20 |
negative | neutral | positive |
0.031 | 0.871 | 0.099 |
Raw frequency | 20 |
Normalized frequency | 0.740 |
Modifier score | 0.500 |
Perplexity | 200.519 |