| Typicality: | 0.315 |
| Saliency: | 0.152 |
| between its exhaust point | 2 | temporal |
| gas → be injected under → back surface of the substrate | 4 |
| gas → be injected under → the substrate | 3 |
| negative | neutral | positive |
| 0.138 | 0.770 | 0.092 |
| Raw frequency | 7 |
| Normalized frequency | 0.152 |
| Modifier score | 0.500 |
| Perplexity | 135.291 |