gas → ReceivesAction → introduced into the chamber
Typicality: 0.415
Saliency: 0.388
Facets 3
through a top nozzle 7 manner
at low pressure 3 manner
for reaction with wafer 2 purpose
Open triples 3
gas → be introduced into → the chamber 13
gas → be introduced into → chamber 10
gas → be introduced to → chamber 3
Sentiment analysis
negative neutral positive
0.054 0.792 0.154
Other statistics
Raw frequency 26
Normalized frequency 0.388
Modifier score 0.500
Perplexity 318.422