| Typicality: | 0.427 |
| Saliency: | 0.263 |
| upon reaching cvd temperature | 2 | temporal |
| at one time | 2 | temporal |
| gas → be introduced into → the system | 5 |
| gas → be used in → the system | 5 |
| gas → be added to → the system | 3 |
| negative | neutral | positive |
| 0.147 | 0.783 | 0.070 |
| Raw frequency | 13 |
| Normalized frequency | 0.263 |
| Modifier score | 0.700 |
| Perplexity | 71.015 |