gas ReceivesAction wasted
Typicality: 0.208
Saliency: 0.388

Facets 2
effectively 2 manner
during the deposition of semiconductor layers 2 temporal
Open triples 1
gas → be → wasted 26
Sentiment analysis
negative neutral positive
0.529 0.352 0.120
Other statistics
Raw frequency 26
Normalized frequency 0.388
Modifier score 0.129
Perplexity 223.162