| Typicality: | 0.250 |
| Saliency: | 0.000 |
| in the heat treatment process | 2 | temporal |
| hydrogen → be diffused into → the dielectric layer | 3 |
| negative | neutral | positive |
| 0.052 | 0.895 | 0.053 |
| Raw frequency | 3 |
| Normalized frequency | 0.000 |
| Modifier score | 0.500 |
| Perplexity | 38.117 |