| Typicality: | 0.305 |
| Saliency: | 0.129 |
| at the same time | 3 | temporal |
| hydrogen → be supplied to → the first interlayer insulating film | 3 |
| hydrogen → add to → first interlayer insulating film | 3 |
| negative | neutral | positive |
| 0.013 | 0.549 | 0.438 |
| Raw frequency | 6 |
| Normalized frequency | 0.129 |
| Modifier score | 0.500 |
| Perplexity | 95.287 |