| Typicality: | 0.290 |
| Saliency: | 0.094 |
| by plasma implantation | 6 | other |
| implant → be performed by → ion beams | 3 |
| implant → be performed by → ion implantation | 3 |
| negative | neutral | positive |
| 0.202 | 0.778 | 0.019 |
| Raw frequency | 6 |
| Normalized frequency | 0.094 |
| Modifier score | 0.500 |
| Perplexity | 230.309 |