impurity → ReceivesAction → implanted into the silicon regions
Typicality: 0.319
Saliency: 0.161
Facets 1
by plasma doping 3 cause
Open triples 2
impurity → be implanted into → the silicon regions 3
impurity → be implanted into → the silicon film 3
Sentiment analysis
negative neutral positive
0.226 0.754 0.020
Other statistics
Raw frequency 6
Normalized frequency 0.161
Modifier score 0.500
Perplexity 265.543