| Typicality: | 0.311 |
| Saliency: | 0.145 |
| more particularly | 2 | degree |
| invention → relate to → microelectromechanical systems | 5 |
| invention → relate to → microelectronic | 4 |
| negative | neutral | positive |
| 0.013 | 0.768 | 0.219 |
| Raw frequency | 9 |
| Normalized frequency | 0.145 |
| Modifier score | 0.500 |
| Perplexity | 11.906 |