| Typicality: | 0.433 |
| Saliency: | 0.429 |
| generally | 44 | manner |
| further | 7 | manner |
| to a method | 4 | other |
| invention → relate to → semiconductor devices | 26 |
| invention → relate to → a semiconductor device | 24 |
| invention → relate to → semiconductor manufacture | 9 |
| invention → relate to → semiconductor processing | 6 |
| invention → relate to → the field of semiconductor devices | 5 |
| invention → relate to → semiconductor technology | 5 |
| invention → relate to → semiconductor structures | 3 |
| negative | neutral | positive |
| 0.024 | 0.827 | 0.149 |
| Raw frequency | 78 |
| Normalized frequency | 0.429 |
| Modifier score | 0.500 |
| Perplexity | 34.233 |