| generally | 12 | manner |
| for the production | 7 | purpose |
| for preparing a base silicon wafer | 6 | purpose |
| invention → relate to → method | 35 |
| invention → be → method | 20 |
| invention → describe → method | 3 |
| negative | neutral | positive |
| 0.037 | 0.795 | 0.168 |
| Raw frequency | 58 |
| Normalized frequency | 0.738 |
| Modifier score | 0.700 |
| Perplexity | 40.874 |