invention (aspect of inventor) → RelatedTo → system
Typicality: 0.378
Saliency: 0.300
Facets 1
for detecting voids in thin layers 5 purpose
Open triples 2
invention → relate to → system 6
invention → be → system 4
Sentiment analysis
negative neutral positive
0.032 0.780 0.188
Other statistics
Raw frequency 10
Normalized frequency 0.300
Modifier score 0.500
Perplexity 51.388