ion → ReceivesAction → implanted into the silicon substrate
Typicality: 0.346
Saliency: 0.224
Facets 1
with an ion beam 2 manner
Open triples 2
ion → be implanted into → the silicon substrate 5
ion → be implanted into → si-containing substrate 3
Sentiment analysis
negative neutral positive
0.036 0.904 0.060
Other statistics
Raw frequency 8
Normalized frequency 0.224
Modifier score 0.500
Perplexity 141.597