| Typicality: | 0.276 |
| Saliency: | 0.061 |
| excluding the peripheral portion | 4 | other |
| laser → be irradiated to → the semiconductor wafer | 4 |
| negative | neutral | positive |
| 0.042 | 0.930 | 0.029 |
| Raw frequency | 4 |
| Normalized frequency | 0.061 |
| Modifier score | 0.500 |
| Perplexity | 81.197 |