method → CapableOf → form a dielectric layer
Typicality: 0.394
Saliency: 0.338
Facets 3
on the first substrate 18 location
as a gate insulator 11 manner
in the recess 7 location
Open triples 7
method → form → a dielectric layer 10
method → include forming → a dielectric layer 10
method → form → the dielectric layer 9
method → form → dielectric layer 9
method → include forming → the dielectric layer 5
method → have → a layer of dielectric material 3
method → include forming → dielectric layer 3
Sentiment analysis
negative neutral positive
0.036 0.902 0.062
Other statistics
Raw frequency 49
Normalized frequency 0.338
Modifier score 0.500
Perplexity 57.882