method → CapableOf → include providing substrate
Typicality: 0.585
Saliency: 0.482
Facets 3
in one embodiment 11 other
with an interlayer dielectric disposed thereon 11 location
in some embodiments 10 other
Open triples 4
method → include providing → substrate 90
method → comprise providing → substrate 62
method → comprise providing having → substrate 5
method → involve providing → substrate 4
Sentiment analysis
negative neutral positive
0.036 0.897 0.067
Other statistics
Raw frequency 161
Normalized frequency 0.482
Modifier score 0.900
Perplexity 305.786