| Typicality: | 0.458 |
| Saliency: | 0.488 |
| , the table format having | 16 | other |
| for processing a substrate | 7 | purpose |
| herein | 6 | location |
| method → be disclosed in → another embodiment | 89 |
| method → be disclosed in → one embodiment | 78 |
| method → be disclosed in → yet another embodiment | 3 |
| negative | neutral | positive |
| 0.035 | 0.875 | 0.090 |
| Raw frequency | 170 |
| Normalized frequency | 0.488 |
| Modifier score | 0.500 |
| Perplexity | 348.108 |