| Typicality: | 0.409 |
| Saliency: | 0.372 |
| onto wafer | 13 | transitive-object |
| to propagate at a selected angle | 5 | purpose |
| to various analysis instruments | 5 | transitive-object |
| mirror → direct → the beam | 17 |
| mirror → steer → the beam | 4 |
| negative | neutral | positive |
| 0.032 | 0.922 | 0.047 |
| Raw frequency | 21 |
| Normalized frequency | 0.372 |
| Modifier score | 0.500 |
| Perplexity | 366.695 |