| Typicality: | 0.471 |
| Saliency: | 0.517 |
| by sputtering | 6 | manner |
| among others | 3 | other |
| on methods | 2 | manner |
| plasma → enhance → chemical vapor deposition | 19 |
| plasma → enhance → physical vapor deposition | 4 |
| negative | neutral | positive |
| 0.047 | 0.878 | 0.074 |
| Raw frequency | 23 |
| Normalized frequency | 0.517 |
| Modifier score | 0.500 |
| Perplexity | 200.173 |