| Typicality: | 0.513 |
| Saliency: | 0.616 |
| by sputtering | 6 | manner |
| of mixtures | 5 | other |
| among others | 3 | other |
| plasma → enhance → cvd | 34 |
| negative | neutral | positive |
| 0.084 | 0.842 | 0.074 |
| Raw frequency | 34 |
| Normalized frequency | 0.616 |
| Modifier score | 0.500 |
| Perplexity | 492.570 |