plasma → CapableOf → etch the substrate
Typicality: 0.325
Saliency: 0.176
Facets 1
to form singulation lines 10 purpose
Open triples 1
plasma → etch → the substrate 6
Sentiment analysis
negative neutral positive
0.024 0.915 0.061
Other statistics
Raw frequency 6
Normalized frequency 0.176
Modifier score 0.500
Perplexity 372.374