| Typicality: | 0.400 |
| Saliency: | 0.352 |
| on the surfaces of the substrates | 2 | location |
| plasma → be generated by → electrode | 7 |
| plasma → be generated on → active electrode | 5 |
| negative | neutral | positive |
| 0.081 | 0.827 | 0.092 |
| Raw frequency | 12 |
| Normalized frequency | 0.352 |
| Modifier score | 0.500 |
| Perplexity | 191.116 |