| Typicality: | 0.424 |
| Saliency: | 0.409 |
| plasma → be generated in → the plasma generation chamber | 6 |
| plasma → be generated in → the plasma chamber | 5 |
| plasma → be generated in → the processing chamber | 4 |
| negative | neutral | positive |
| 0.097 | 0.851 | 0.052 |
| Raw frequency | 15 |
| Normalized frequency | 0.409 |
| Modifier score | 0.500 |
| Perplexity | 122.610 |