| Typicality: | 0.483 |
| Saliency: | 0.925 |
| through etching the first insulating film | 9 | manner |
| by applying a negative pressure | 7 | manner |
| integrally | 4 | manner |
| protrusion → be → formed | 49 |
| protrusion → be → made | 4 |
| protrusion → be formed for → example | 3 |
| negative | neutral | positive |
| 0.055 | 0.880 | 0.064 |
| Raw frequency | 56 |
| Normalized frequency | 0.925 |
| Modifier score | 0.000 |
| Perplexity | 315.285 |